Investigation of CdSb surfaces after different processing methods

 

Chem. Met. Alloys 3 (2010) 1-4

https://doi.org/10.30970/cma3.0109

 

S.G. DREMLYUZHENKO

 

The effect of different processing methods on the surface of CdSb crystals has been studied. Studies by the electron Auger-spectroscopy method have shown the presence of etchant components in the near-surface oxide layer. Chemical-mechanical polishing with an alkaline solution of colloidal silica allows obtaining an oxide layer of minimum thickness and a contaminated surface of close to stoichiometric composition.

 

 

Morphology of a CdSb single crystal surface obtained by (secondary electrons on REM-100U): chemical-mechanical polishing with a SiO2 alkaline solution.

 

Keywords

Mechanical polishing / Chemical treatment / Chemical-mechanical polishing / CdSb / Surface / Damaged layer